ZH Series

ZH Series: Horizontal Z-Axis Stages

The ZH Series Horizontal Z-Axis stages deliver ultra-precise vertical elevation in a highly compact footprint. Available in aluminum (ZH20) or heavy-duty steel (ZH20H) to suit your specific industrial requirements.

Precision Engineering for Vertical Motion

• Low-Profile Wedge Design: Converts horizontal motion into precise Z-axis lift, drastically saving vertical space. This design is critical for applications where machine height is constrained but high-accuracy vertical positioning is non-negotiable.
• Versatile Payloads: Choose the lightweight aluminum ZH20 for high-dynamic applications, or the steel ZH20H to support heavy payloads up to 80 kg with maximum rigidity.
• Micro-Level Precision: Achieves ±1 µm repeatability, making it the preferred choice for semiconductor inspection and precision optical alignment. Optional optical scale integration is available for full closed-loop control.

Core Performance Highlights

• Space-Saving Architecture: The horizontal input allows the motor to be mounted parallel to the base, reducing the overall vertical profile of the stage.
• High Rigidity: Steel variants provide exceptional resistance to deflection under heavy vertical loads, ensuring long-term accuracy in industrial environments.
• Cleanroom Ready: The enclosed wedge mechanism and precision components are well-suited for sensitive manufacturing environments like semiconductor and medical device assembly.

Target Precision Motion Applications

The ZH series is optimized for high-precision vertical indexing and positioning:

• Semiconductor Inspection: Precise vertical positioning for wafer metrology and defect analysis.
• Optical Sensor Alignment: Micro-level Z-adjustment for high-resolution imaging systems.
• Electronics Assembly: Precise vertical placement of delicate components in compact assembly cells.
• Laboratory Automation: High-accuracy liquid handling and sample positioning.