High-Stability XY Direct-Drive Stages for Nanometer-Precision Semiconductor and FPD Inspection
High-Stability XY Direct-Drive Stages for Nanometer-Precision Semiconductor and FPD Inspection Download native CAD models and request a technical quote for the
The LXY Series is TOYO's premium XY linear motor solution, engineered for high-end inspection and metrology applications that demand sub-micron accuracy across two orthogonal axes. By integrating two precision-aligned direct-drive stages into a single factory-tested unit, the LXY series eliminates the common mechanical errors and alignment complexities associated with building custom XY systems.
At the heart of the LXY series is TOYO's low-cogging linear motor technology. Unlike traditional XY stages that rely on ball screws or belts, the direct-drive LXY platform has no mechanical contact between the drive and the carriage. This results in zero backlash, extremely low velocity ripple (0.1%), and a maintenance-free lifecycle. Whether you are performing wafer inspection or nanometer-scale laser micromachining, the LXY provides the stable, frictionless motion required for the world's most sensitive automation tasks.
The LXY series features a factory-aligned XY orthogonal configuration, eliminating the complexity of multi-axis assembly. Direct-drive linear motor technology removes the need for ball screws, ensuring zero backlash and superior dynamic response.
Equipped with high-resolution linear encoders, the LXY series achieves repeatability as fine as ±0.5 μm. This makes it the definitive choice for nanometer-scale inspection in semiconductor and medical labs.
TOYO's optimized magnetic circuit design minimizes cogging force and speed ripple, providing the ultra-smooth velocity control required for high-resolution scanning and optical inspection.
Built on precision-ground mechanical bearings and a high-rigidity base, the LXY series supports payloads up to 50kg while maintaining structural integrity during high-acceleration (0.5G) movements.
Compare the LXY Series with similar high-performance series in our portfolio.
Multi-Axis Belt Type
| Specification | LXY-100 | LXY-150 | LXY-300 |
|---|---|---|---|
| Product Size (W x H mm) | coming soon | 465 x 93 | 653 x 122 |
| Repeatability (μm) | ±0.3 | ||
| Maximum Payload (kg) | 3 | 3 | 6 |
| Peak Thrust (N) | 24 | 200 | 579 |
| Maximum Travel (mm) | 100 x 100 | 150 x 150 | 300 x 300 |
| Maximum Speed (mm/s) | 600 | ||
| Maximum Acceleration (G) | 0.5 | ||
1 Specifications are based on standard optical encoder configurations. Custom high-resolution (sub-nm) options available upon request.
| Specification | 100 (mm) |
150 (mm) |
300 (mm) |
|---|---|---|---|
| LXY-100 Weight (kg) | coming soon | Not Available | |
| LXY-150 Weight (kg) | Not Available | coming soon | Not Available |
| LXY-300 Weight (kg) | Not Available | coming soon | |
To ensure the highest level of design accuracy and reduce your engineering lead times, TOYO Robotics Americas provides a comprehensive library of native CAD models. Hosted through our CAD Community Portal, these models are not generic placeholders; they are highly detailed, configurable files designed to drop directly into your assembly.
Select a size to view the specific ordering code configuration:
Contact our application engineers to generate your exact part number or for complex multi-axis configurations.
Request Configuration Support