LTS / ETS Series

High-rigidity actuators delivering sub-micron repeatability and 24/7 reliability. These cast iron designs offer thermal stability, vibration resistance, and sub micron positioning.

High-Precision Linear Positioning Stages: The LMT & ETS Series Overview

The TOYO LMT and ETS Series represent the pinnacle of high-precision motion, engineered for applications where sub-micron accuracy is non-negotiable. Designed with a high-performance cast iron base, these positioning stages offer superior thermal stability and vibration damping compared to standard aluminum extrusions. This robust architecture, combined with a specialized low-reflectivity black finish, makes these stages the ideal choice for optically sensitive laser processing, semiconductor metrology, and high-end laboratory automation. By integrating the guide and drive systems into a single streamlined unit, the series delivers maximum rigidity and load capacity within a space-saving footprint.

Drive Technologies: Linear Motor vs. Ball Screw

To meet diverse application requirements, these stages are available in two primary drive configurations, each offering distinct mechanical advantages:

• Linear Motor Drive: Best for applications requiring extreme velocity smoothness and high-speed throughput. With no mechanical contact between the motor and the carriage, this drive eliminates friction and wear, achieving a velocity ripple of less than 1.5% at 100mm/s and maintenance-free longevity.
• Precision Ball Screw Drive: Ideal for high-force applications and vertical orientations. This drive provides excellent mechanical advantage and stiffness, delivering reliable, high-torque positioning with the same sub-micron repeatability expected of TOYO’s world-class engineering.

Core Performance Highlights

• Sub-Micron Positioning: Achieves exceptional ±0.5 μm repeatability, ensuring absolute consistency in precision-critical tasks.
• Thermal & Vibration Stability: The heavy-duty cast iron construction minimizes thermal expansion and absorbs high-frequency vibrations for a stable processing environment.
• Optically Optimized: The stage's matte black surface treatment is specifically designed to reduce light scatter in laser-based inspection and manufacturing.
• Ultra-Smooth Velocity: Advanced motor control and high-precision bearings result in exceptionally stable motion profiles, critical for scanning and imaging applications.

Target Precision Motion Applications

These stages are the preferred solution for industries requiring the highest levels of accuracy and environmental control:

• Laser Micro-Machining: Ideal for precision cutting, drilling, and marking where reflectivity must be minimized.
• Semiconductor Metrology: High-stability wafer inspection and die-bonding processes.
• Optical Inspection: Automated microscopy and lens alignment requiring jitter-free motion.
• Biotech & Life Sciences: High-throughput screening and automated liquid handling.