Frictionless Precision for the Nanoscale

The LBT Series is TOYO's flagship air bearing linear motor stage, designed for applications where even the slightest mechanical vibration or friction is unacceptable. By floating the carriage on a precision-controlled thin film of air, the LBT series achieves motion stability and repeatability that traditional mechanical stages cannot match.

The "Zero-Wear" Advantage

Unlike ball screw or conventional linear motor stages, the LBT series has no contacting parts in its guide system. This "zero-wear" architecture means that the stage's precision remains constant for decades of operation, with no performance degradation and zero maintenance requirements. Combined with ISO Class 1 cleanroom compatibility, the LBT series is the definitive choice for semiconductor wafer inspection, flat-panel display manufacturing, and high-end optical metrology.

Performance Highlights

• ±0.2 μm Repeatability: Sub-micron precision enabled by frictionless motion and high-resolution optical feedback.
• 0.1% Speed Ripple: Exceptionally smooth motion at low and high speeds, critical for high-resolution imaging and scanning.
• ISO Class 1 Cleanroom Rated: Inherently non-contaminating design with no lubricants or wear particles.
• Maintenance-Free Lifecycle: Solid-state motion with no contacting components eliminates the need for periodic service or lubrication.

Target Applications

• Semiconductor Metrology: Wafer inspection, lithography, and nanoscale defect detection.
• Optical Inspection: High-resolution scanning for flat panel displays and precision lenses.
• Laser Micromachining: Nanometer-scale accuracy for medical device fabrication and micro-electronics.
• High-End Calibration: Primary standard measurement for precision engineering and aerospace components.