High-Performance Cleanroom-Prepped Ball Screw Actuator
High-Performance Cleanroom-Prepped Ball Screw Actuator Download native CAD models and request a technical quote for the ECH Series series today.
The TOYO ECH Series represents the pinnacle of sterile automation technology, engineered specifically for industries where precision motion must coexist with stringent contamination control. Built on the proven mechanical foundation of our ETH ball screw drive, the ECH is redesigned with a specialized sealing architecture and vacuum suction ports to minimize particle emissions. This series allows engineers to deploy high-speed, high-payload automation into ISO-classified cleanrooms—from semiconductor fabrication to pharmaceutical packaging—without compromising on reliability or throughput.
The ECH Series is the preferred choice for applications where "zero-failure" performance and "zero-contamination" are mandatory:
Every ECH unit is tested and classified in accordance with international ISO standards. This certification ensures that the actuator meets the rigorous requirements for air cleanliness, making it a "plug-and-play" solution for sensitive semiconductor and biotech facilities.
The ECH features a specialized stainless steel strip seal and an internal vacuum suction port. This design effectively captures internal particulates and prevents the ingress of external contaminants, protecting both the actuator’s life and the integrity of your cleanroom.
Engineered for efficiency, the ECH series doesn't trade speed for cleanliness. By optimizing the ball screw and nut interface, these actuators can reach peak acceleration and 1,600 mm/s speeds, outperforming standard cleanroom models that often face thermal or friction limitations.
By utilizing TOYO’s vertically integrated manufacturing—producing our own precision ball screws and extrusions—we provide a high-end cleanroom solution at a lower bill-of-materials cost than domestic or European legacy brands, all while maintaining shorter lead times.
Compare the ECH Series with similar high-performance series in our portfolio.
Ball Screw Actuator-Slider Type
| Specification | ECH14 | ECH17 / 17M | ECH22 / 22M |
|---|---|---|---|
| Product Size (W x H mm) | 135 x 91 | 170 x 107 | 220 x 138 |
| Repeatability (µm) | ±5 | ±5 | ±5 |
| Maximum Payload (kg)(1) | 1200 | 1875 | 2585 |
| Maximum Thrust (N)(1) | coming soon | coming soon | coming soon |
| Maximum Travel (mm) | 1050 | 1250 2200 (M) |
1500 2400 (M) |
| Maximum Speed (mm/s) | 1920 | 2400 | 2400 |
| Maximum Acceleration (G) | 1 | 1 | 1 |
| Operating Temperature (°C)(2) | 0 - 40 | 0 - 40 | 0 - 40 |
1 Maximum payload and thrust are specified based on an L10 life rating. For the load specified, the life is expected to be 1000km. To calculate life for your application specifically, please contact us.
2 For extreme temperatures outside of this range, special greases are required.
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|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| ECH14 Weight (kg) | 10.5 | 11.1 | 11.7 | 12.3 | 12.9 | 13.5 | 14.1 | 14.7 | 15.3 | 15.9 | 16.5 | 17.1 | 17.7 | 18.3 | 18.9 | 19.5 | 20.1 | 20.7 | 21.3 | 21.9 | 22.5 | Not Available | ||||||||||||||||||||||||||
| ECH14-L5 Critical Speed (mm/s) | 300 | 275 | 250 | 225 | 200 | 175 | 150 | 125 | 100 | Not Available | ||||||||||||||||||||||||||||||||||||||
| ECH14-L10 Critical Speed (mm/s) | 600 | 550 | 500 | 450 | 400 | 350 | 300 | 250 | 200 | Not Available | ||||||||||||||||||||||||||||||||||||||
| ECH14-L20 Critical Speed (mm/s) | 1200 | 1100 | 1000 | 900 | 800 | 700 | 600 | 500 | 400 | Not Available | ||||||||||||||||||||||||||||||||||||||
| ECH14-L32 Critical Speed (mm/s) | 1920 | 1760 | 1600 | 1440 | 1280 | 1120 | 960 | 800 | 640 | Not Available | ||||||||||||||||||||||||||||||||||||||
| ECH17 Weight (kg) | 11.84 | 12.62 | 13.4 | 14.18 | 14.96 | 15.74 | 16.52 | 17.3 | 18.08 | 18.86 | 19.64 | 20.42 | 21.2 | 21.97 | 22.75 | 23.53 | 24.31 | 25.09 | 25.87 | 26.65 | 27.43 | 28.21 | 28.99 | 29.77 | 30.55 | Not Available | ||||||||||||||||||||||
| ECH17M Weight (kg) | Not Available | 33.15 | 33.85 | 34.55 | 35.24 | 35.94 | 36.64 | 37.34 | 38.04 | 38.74 | 39.43 | 40.13 | 40.83 | 41.53 | 42.23 | 42.92 | 43.62 | 44.32 | 45.02 | 45.72 | 46.42 | 47.11 | 47.81 | 48.51 | 49.21 | 49.91 | 50.61 | 51.3 | 52.0 | 52.7 | Not Available | |||||||||||||||||
| ECH17-L5 Critical Speed (mm/s) | 300 | 267 | 250 | 225 | 200 | 175 | 150 | Not Available | ||||||||||||||||||||||||||||||||||||||||
| ECH17-L10 Critical Speed (mm/s) | 600 | 533 | 500 | 450 | 400 | 350 | 300 | Not Available | ||||||||||||||||||||||||||||||||||||||||
| ECH17-L20 Critical Speed (mm/s) | 1200 | 1067 | 1000 | 900 | 800 | 700 | 600 | Not Available | ||||||||||||||||||||||||||||||||||||||||
| ECH17-L40 Critical Speed (mm/s) | 2400 | 2133 | 2000 | 1800 | 1600 | 1400 | 1200 | Not Available | ||||||||||||||||||||||||||||||||||||||||
| ECH17M-L5 Critical Speed (mm/s) | Not Available | 300 | 283 | 267 | 250 | 233 | 217 | 200 | 183 | 175 | 150 | 125 | Not Available | |||||||||||||||||||||||||||||||||||
| ECH17M-L10 Critical Speed (mm/s) | Not Available | 600 | 567 | 533 | 500 | 467 | 433 | 400 | 367 | 350 | 300 | 250 | Not Available | |||||||||||||||||||||||||||||||||||
| ECH17M-L20 Critical Speed (mm/s) | Not Available | 1200 | 1133 | 1067 | 1000 | 933 | 867 | 800 | 733 | 700 | 600 | 500 | Not Available | |||||||||||||||||||||||||||||||||||
| ECH17M-L32 Critical Speed (mm/s) | Not Available | 1920 | 1813 | 1707 | 1600 | 1493 | 1387 | 1280 | 1173 | 1120 | 960 | 800 | Not Available | |||||||||||||||||||||||||||||||||||
| ECH22 Weight (kg) | 27.5 | 28.96 | 30.42 | 31.88 | 33.33 | 34.79 | 36.25 | 37.71 | 39.17 | 40.63 | 42.09 | 43.54 | 45.0 | 46.46 | 47.92 | 49.38 | 50.84 | 52.3 | 53.76 | 55.21 | 56.67 | 58.13 | 59.59 | 61.05 | 62.51 | 63.97 | 65.42 | 66.88 | 68.34 | 69.8 | Not Available | |||||||||||||||||
| ECH22M Weight (kg) | Not Available | 56.01 | 57.37 | 58.73 | 60.09 | 61.45 | 62.81 | 64.17 | 65.53 | 66.89 | 68.25 | 69.61 | 70.97 | 72.33 | 73.69 | 75.05 | 76.41 | 77.77 | 79.13 | 80.49 | 81.85 | 83.21 | 84.57 | 85.93 | 87.29 | 88.65 | 90.01 | 91.37 | 92.73 | 94.09 | 95.45 | 96.81 | 98.17 | |||||||||||||||
| ECH22-L5 Critical Speed (mm/s) | 300 | 275 | 250 | 225 | 200 | 175 | 150 | 125 | 100 | Not Available | ||||||||||||||||||||||||||||||||||||||
| ECH22-L10 Critical Speed (mm/s) | 600 | 550 | 500 | 450 | 400 | 350 | 300 | 250 | 200 | Not Available | ||||||||||||||||||||||||||||||||||||||
| ECH22-L25 Critical Speed (mm/s) | 1500 | 1375 | 1250 | 1125 | 1000 | 875 | 750 | 625 | 500 | Not Available | ||||||||||||||||||||||||||||||||||||||
| ECH22-L40 Critical Speed (mm/s) | 2400 | 2200 | 2000 | 1800 | 1600 | 1400 | 1200 | 1000 | 800 | 600 | 400 | Not Available | ||||||||||||||||||||||||||||||||||||
| ECH22M-L5 Critical Speed (mm/s) | Not Available | 300 | 283 | 267 | 250 | 233 | 225 | 217 | 208 | 200 | 175 | 150 | ||||||||||||||||||||||||||||||||||||
| ECH22M-L10 Critical Speed (mm/s) | Not Available | 600 | 567 | 533 | 500 | 467 | 450 | 433 | 417 | 400 | 350 | 300 | ||||||||||||||||||||||||||||||||||||
| ECH22M-L20 Critical Speed (mm/s) | Not Available | 1200 | 1133 | 1067 | 1000 | 933 | 900 | 867 | 833 | 800 | 700 | 600 | ||||||||||||||||||||||||||||||||||||
| ECH22M-L40 Critical Speed (mm/s) | Not Available | 2400 | 2267 | 2133 | 2000 | 1867 | 1800 | 1733 | 1667 | 1600 | 1400 | 1200 | ||||||||||||||||||||||||||||||||||||
To ensure the highest level of design accuracy and reduce your engineering lead times, TOYO Robotics Americas provides a comprehensive library of native CAD models. Hosted through our CAD Community Portal, these models are not generic placeholders; they are highly detailed, configurable files designed to drop directly into your assembly.
Select a size to view the specific ordering code configuration:
Contact our application engineers to generate your exact part number or for complex multi-axis configurations.
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